Inspecting method, inspecting system, and method for manufacturing electronic devices

ABSTRACT

The present invention has an analyzing unit including an image detection device for producing a plurality of images of a workpiece, a storage for storing detected images produced by the image detection device, and a display having a screen with a first area for displaying a plurality of detected images stored in the storage and a plurality of second areas for classifying the detected images according to features of the detected images, whereby the plurality of detected images are moved on the screen from the first area to selected second areas to classify the plurality of detected images in the second areas.

BACKGROUND OF THE INVENTION

The present invention relates to an analyzing unit, an inspecting systemand a manufacturing method using the inspecting system, which areapplied to a production line used in the manufacture of electronicdevices and the like; and, more particularly, the invention relates toan analyzing unit, an inspecting system and a manufacturing method usingthe inspecting system, which efficiently classify images obtained as aresult of inspection of devices being manufactured, to thereby shortenthe analysis time required to detect a failure on the production lineand to enable enhancement of manufacturing efficiency and a rapid yieldramp-up.

An electronic device, typically a semiconductor, is formed by repeatinga plurality of processing steps, including exposure, development,etching and the like, on a wafer substrate. On the other hand, incertain ones of the plurality of processing steps, informationindicating the position, size, number, category, etc. of foreign matterwhich has adhered to the wafer, as well as appearance failures, andinformation indicating the processing dimensions of workpiece(hereinafter generally referred to as defects) are collected by aforeign matter inspecting apparatus, an optical visual inspectionapparatus, and an inspecting apparatus, such as a SEM, if necessary. InMonthly Publication, “Semiconductor World”, 1996.8, pp 88, 99 and 102,it is indicated that all of the inspecting data are normally sent fromthe inspecting apparatus to an analyzing system through a network forcontrol and analysis of the production.

Further, in the plurality of processing steps, an electronic microscopeor the like is used to specify the cause of an occurrence of defects toobtain a defect image and perform a classifying operation on the basisof the shapes and sizes of the actual defects. This classifyingoperation is carried out visually on the screen of a personal computeror the like, whereby defect images are sampled on the basis of the size,the shape and the like of the defects, and then the defects areclassified into groups of similar defects. It is noted that for thedefects to be sampled, several numbers of defects per wafer are manuallydetermined, referring to the distribution of defects as a wafer map.Recently, several hundreds of defect images per hour have beenautomatically obtained by an automatic defect review (ADR) of defectimages. Anyway, the number of image samples being handled has tended toincrease.

SUMMARY OF THE INVENTION

However, the user interface (image display) used in the classifyingoperation has not been sufficiently considered. Therefore, with theconventional system, it is difficult to efficiently classify a number ofdetected images, thereby not only requiring an extensive time for theclassifying operation, but the analysis accuracy also tends to be toolow. The number of images detected in the future is expected toincrease, and so it is important to enhance the convenience of use ofthe classifying operation and to shorten the time needed for theclassifying operation. Further, there is a possibility that theretirement of long time periods for the classifying operation willresult in a delay in a feedback operation and a great hindrance to theyield of the production line.

It is an object of the present invention to shorten the analysis timeand enhance the analysis accuracy by improving the user interface. It isa further object of the present invention to enhance the yield of theproduction line.

For achieving the aforementioned objects, according to the presentinvention, there is provided an inspecting system comprising ananalyzing unit, said analyzing unit including an image detection devicefor photographing a plurality of images of a workpiece; a storage meansfor storing images produced by said image detection device; and adisplay means having a first area for displaying a plurality of theimages that are stored in said memory means and a plurality of secondareas for classifying said detected images according to features of saiddetected images; wherein said plurality of detected images can be movedon a screen from said first area to corresponding second areas toclassify said plurality of detected images in said second areas.

Further, there is provided an analyzing unit comprising a storage meansfor storing a plurality of detected images; and a display means having afirst area for displaying a detected image that is stored in saidstorage means and a plurality of second areas for classifying saiddetected images according to features of said detected images; whereinsaid plurality of detected images can be moved on a screen from saidfirst area to corresponding second areas to classify said plurality ofdetected images in said second areas.

Further, there is provided a method of manufacturing an electronicdevice wherein use is made of a manufacturing apparatus for processing aworkpiece to form an electronic device; an inspecting apparatus forinspecting the workpiece processed by said manufacturing apparatus; andan analyzing unit including an image detection device capable ofphotographing an image of said workpiece, a storage means for storingimages provided by said image detection device, and a display meanshaving a first area for displaying an image that is stored in saidstorage means and a plurality of second areas for classifying saidimages according to features of said images, whereby said plurality ofimages can be moved on a screen from said first area to correspondingsecond areas to classify said plurality of images in said second areas;wherein the production line having said manufacturing apparatus arrangedthereon is controlled using information obtained from said analyzingunit to process the workpiece.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram showing a defect image display which is capable of aclassification function according to one embodiment of the presentinvention;

FIG. 2 is a block diagram showing an inspecting system according to oneembodiment of the present invention;

FIG. 3 is a processing flow diagram showing one embodiment of aninspecting method in accordance with the present invention;

FIG. 4 is a diagram showing an example a data format created beforeclassification in accordance with the present invention;

FIG. 5 is a diagram showing an example of a display screen as it appearsbefore classification in accordance with the present invention;

FIGS. 6( a) and 6(b) are diagrams showing a display screen as it appearsduring a step of the classification and a data format related thereto,respectively, in accordance with the present invention;

FIGS. 7( a) and 7(b) are diagrams showing a display screen as it appearsduring a further step of the classification and the data format relatedthereto, respectively;

FIGS. 8( a) and 8(b) are diagrams showing a display screen as it appearsduring a further step of the classification and the data format relatedthereto, respectively;

FIGS. 9( a) and 9(b) are diagrams showing a display screen as it appearsduring a further step of the classification and the data format relatedthereto, respectively;

FIG. 10 is a diagram showing a display screen as it appears aftercompletion classification in accordance with the present invention;

FIG. 11 is diagram showing an example of the data format as it existsafter classification is completed;

FIG. 12 is a processing flow chart showing a method of automaticclassification according to the present invention;

FIG. 13 is a diagram showing a display screen as it appears duringclassification in accordance with the automatic classification method;

FIG. 14 is a diagram representative of functions used for automaticclassification in accordance with the present invention;

FIG. 15 is a diagram showing a display screen as it appears duringclassification in accordance with a connection of classification; and

FIG. 16 is a diagram showing a defective classification result analyzingfunction in accordance with the present invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Embodiments of the present invention will now be described in detailwith reference to the accompanying drawings.

FIG. 1 is a view showing an example of a display illustrating aclassification function performed on detected defect images on a PC(Personal Computer) display screen equipped with an analyzing unit. Inthe figure, reference numeral 101 designates a display screen of a PC.Numeral 151 designates an unclassified image display area for displayingdetected defect images which have not been subjected to a classificationoperation. Numeral 102 designates detected individual defect imagesdisplayed in the unclassified image display area 151. Numerals 152 to155 designate classification areas for classifying defect images.Numerals 103 to 106 designate typical defect images having featuresassigned to the classification areas 152 to 155, respectively. Forexample, a typical defect image 103 having a white and round defectfeature is displayed in area 152, a typical black and round defect image104 is displayed in area 153, an elongated defect image 105 is displayedin area 154, and a large defect image 106 is displayed in area 155.Numeral 107 designates a processing button for executing a preassignedfunction.

As will be understood from FIG. 1, the present embodiment is designed sothat a plurality of classification areas for classifying defect imagesare provided on a screen, and typical images and classified images areboth displayed on the screen in these areas. Therefore, in the casewhere a plurality of detected defect images are to be classified, evenif a number of defect images having complicated shapes are displayed, auser need only move the individual defect images to an optimalclassification area having a typical image indicative of similar visualfeatures in order to carry out the classification operation easily andquickly. In particular, since the classification operation can becarried out by a drag and drop operation using a mouse or the like onthe screen, the classification operation can be carried out whilelooking at all the defect images on the display screen, with the resultthat the classification operation can be performed while relativelycomparing all the defect images, and so its operativeness is excellent.The details of this operation will be described later.

FIG. 2 is a block diagram showing one example of a system for realizingthe present invention. In this figure, the system comprises an imagedetecting device 201; a storage unit 202; display/analyzing devices 203and 204; a system control computer 205; and a network 201, such as LANin a factory. The storage unit 202 either may be connected to an imagedetecting device, or it may be connected to a separate apparatus on thenetwork, for example, the image detecting device 201. It is noted thatthe display/analyzing function as shown in FIG. 1 can be incorporated inthe image detecting device 201, or be included as a function of thecomputer connected to the image detecting device 201, or be incorporatedin the display/analyzing device 204 in an office or the like physicallylocated distant therefrom; however, in the present embodiment, thefunction thereof is provided in the display/analyzing device 203. Aplurality of image detecting devices 201 may be provided, though theyare not shown, in which case the system control computer 205 is able todistribute a feature so that it is set and adjusted to each imagedetecting device 201. Thereby, in the classification performed at eachimage detecting device 201, the features can be standardized. Thesetting and adjustment of the features will be described later.

FIG. 3 is a diagram showing the processing flow of the operation of theinspection system shown in FIG. 2.

First, the image detecting device 201 detects one hundred to threehundred defect images in a single wafer (Step 300). The detected defectimages are temporarily stored in a memory of the image detecting device201 with a defect location coordinate corresponding to the location ofthe defect on the wafer (Step 301).

Next, the image detecting device 201 calculates the features of thedetected images stored in the memory (Step 302). For example, itcalculates numerical values for the size, color, shape and the like ofthe detected images.

When the features of the detected images are calculated, a data formatas shown in FIG. 4 is generated, which data is transmitted to thestorage unit 202 (Step 303). The data format shown in FIG. 4 isconstituted so that the coordinate of the defects, the date and time ofoperation, the name of the corresponding detected image, the features,and the classification categories showing information in the case wherethe detected images are classified can be described. In this case, sincethe classification operation has not yet been carried out on thedetected images, information indicating non-classification is describedin the classification category. Alternatively, the data format may beconstituted so that inspection results of detected images or the likeare directly transmitted to the storage unit 202, and the storage unit202 carries out a calculation of the features and production of the dataformat. Further, alternatively, the data format may be constituted sothat the image detecting device 201 also carries out the calculation offeatures of the detected images.

In this manner, image information, which includes such information asthe image itself, the position, the detecting condition, the feature andthe category, collected for every wafer, are sequentially stored in thestorage unit 202.

Now, in the case where a user carries out the classification of theimage information, first, the display/analyzing device 203 obtains theimage information shown in FIG. 4 from the storage unit 202 (Step 304).For example, identification information, such as wafer numbers of wafersto be subjected to the classification operation, is input into thedisplay/analyzing device 203, and corresponding image information isobtained from the storage unit 202.

The display/analyzing device 203, which has obtained the imageinformation, displays the detected defect images on the unclassifiedimage display area 151 (Step 305). FIG. 5 shows an example of such adisplay, in which twenty defect images having various shapes, sizes, andcolors are displayed.

Next, there is prepared on the display screen a classification area 152for classifying defect images, as shown in FIG. 6( a) (Step 306). Forthis purpose, a classification area displayed on the display screen isrelated to a category of the area as shown in FIG. 6 (b) That is to say,each area in the display screen is characterized, and a category(features) related as in FIG. 6( b) is imparted to the defect imageclassified into each respective area. In FIG. 6(b), the fact that thecategory is white is imparted to defect images positioned at areacoordinates (000160,000020) (000220,000100) of the classification area152. However, in FIG. 6( b), since the defect images have not yet beenmoved on the display screen from the unclassified image display area 151to the classification area 152 on the display screen, attached imagenames are not described in the column applicable to the classificationarea 152. Further, the fact that the category is unclassified isimparted to defect images positioned inside the coordinates(000010,000020) (000150,000400) of the unclassified image display area151. Accordingly, in FIGS. 6 (a) and 6 (b), all the defect images aredescribed as being unclassified. Area attribute information shown inFIG. 6( b) is information stored within the display/analyzing device203. Further, information of an attached image shown in FIG. 6( b) isnot always necessary, but it will suffice that at least theclassification area and the attribute (category) of the area arerecognized.

Next, a defect image 402 which is to be indicative of the characteristicof the classification area 152 is moved from the unclassified imagedisplay area 151 to serve as a typical defect image for theclassification area 152, as shown in FIG. 7( a) (Step 307). For example,a typical defect image 402 present in the unit classified image displayarea 151 is clicked by a mouse and moved to the classification area 152by a drag and drop operation. In this case, in the area categoryinformation shown in FIG. 7( b), a moved defect image IMG001 isdescribed in the column of the area coordinates (000160, 000020)(000220,000100), as category “white.” Alternatively, it is possible thatthe actual defect image is not moved from the unclassified image displayarea 151, but that a schematic image is displayed instead. In this case,a plurality of schematic images as desired are produced in advance, andthe thus produced images may be introduced as typical defect images inrespective classification areas. Alternatively, also, the typical defectimage or images need not be displayed on the respective classificationareas, but text information representative of the features may bedisplayed.

Then, other unclassified defect images similar to the typical defectimage 402 are selected from the unclassified image display area 151 andtransferred into the classification area 152, while referring to thetypical defect image 402 displayed in the classification area 152 (Step308). For example, an applicable defect image present in theunclassified image display area 151 is clicked by a mouse and moved tothe classification area 152 by a drag and drop operation. In FIGS. 8( a)and 8(b), defect images IMG005 and IMG010, which are similar to thedefect image IMG001, are classified.

Similarly, the other classification areas 153, 154, 155 are defined, asshown in FIGS. 9( a) and 9(b), and unclassified defect images which aresimilar to a particular typical defect image are classified from theunclassified image display area 151 to the classification areas 152,153, 154, 155, whereby the classification operation with respect to allthe defect images is carried out. FIG. 10 is a display screen showingthe classification results. While in this case, four differentclassification areas were provided for the classification operation, itis noted that the contents and the number of the categories may bechanged as necessary.

Next, a data format as shown in FIG. 11 is produced from the classifiedresults shown in FIG. 10 (the data format shown in FIG. 4 is updated),and the data is transmitted from the display/analyzing device 203 to thestorage unit 202 (Step 309). For example, corresponding attributeinformation is obtained from a position on the display screen on whichthe defect image is arranged on the basis of the area attributeinformation shown in FIG. 6( b) at a fixed timing after completion ofthe classification operation or during the classification operation, andthe classification category shown in FIG. 11 is updated. Also, in thiscase, the classified result per wafer unit is transmitted.

Since, as described above, a classification area for classifying thedefect images is provided on the screen, and a typical image isdisplayed on the screen, even when the detected defect images areclassified, if a plurality of defect images having a complicated shapeshould be displayed, the user need merely move the defect images to theoptimal classification area representing similar visual features, thusenabling execution of the classification operation easily and quickly.In particular, since the classification operation can be carried out onthe screen by a drag and drop operation using a mouse, theclassification operation can be carried out while looking at all thedefect images on the display screen, and the classification operationcan be performed while relatively comparing all the defect images toprovide excellent selectivity and discrimination.

Next, an example will be described in which unclassified defect imagesare automatically classified, and the classified results are correctedto classify the defect images. The automatic classification and thecorrecting function are combined so that the defect images are roughlyautomatically classified, after which a correction is added, whereby itis possible to shorten the operating time of the classificationoperation and to enhance the classification accuracy. FIG. 12 shows theprocessing flow for this method.

A plurality of classification areas are preset for automaticclassification. For example, classification areas 152 to 155 areprepared using a procedure similar to that described previously, asshown in FIG. 13. Also in this case, the classification areas displayedon the display screen are related to the attributes thereof. The areaattribute information is stored in a display/analyzing device 203.

Further, functions for automatic classification are stored in thedisplay/analyzing device 203. This function is provided to calculate towhich category the features of a particular defect image belongs. FIG.14 is a diagram which schematically shows the functions. This diagramrepresents the function between an area of the defect image and thegray-scale value thereof and, on the basis of this function, acalculation is made to determine at which area the features of thedefect image are positioned in the figure. For example, if the featureis positioned in a certain position relative to (tA, uA) as a center,the defect image thereof is calculated as a category A. While FIG. 14shows a secondary function of the area and the gray-scale value, it isto be noted that other parameters may be used, or a multifunction, suchas a cubic or quadratic function, may be used.

Next, the display/analyzing device 203 obtains the detected result shownin FIG. 4 from the storage unit 202 and displays the detected defectimage on the unclassified image display area 151 (Step 1201). Theprocessing up to the point where the display/analyzing device 203displays the detected defect image on the unclassified image displayarea 151 is similar to that of the example previously mentioned, and soa repetition of the detailed description is omitted.

Next, the automatic classification starts on the defect image displayedon the unclassified image display area 151 (Step 1202). That is, acategory in which the feature of each defect image falls is calculatedon the basis of the function stored in the image detecting device 201(Step 1203).

When the category is calculated, the defect image is moved to thecorresponding classification area on the display screen on the basis ofthe aforementioned area attribute information (Step 1204). FIG. 15 is aview showing a display screen after such movement. With respect to adefect image that cannot be subjected to image processing according tothe detected conditions leading to failure to obtain the necessaryfeatures, or a defect image which does not fall under any category, thedefect image is moved from the unclassified area to a specificclassification area manually in the manner described previously using amouse or a keyboard for effecting the classification operation.

In the case where the classification for all the images is completed(Step 1205), the classified result is confirmed (Step 1211), and whetheror not the classified result is to be corrected is judged by examinationof the screen (Step 1212). The correction of the classified result isshown in FIG. 15. In FIG. 15, in the case where a defect image A iscorrected in category by transferring it from a classification area 155to a classification area 153, for example, the defect image A present inthe classification area 155 is clicked by a mouse (Step 1206) and movedto the corresponding classification area 153 by a drag and dropoperation, thus enabling easy correction of the classified result (Step1209). Alternatively, in the case where no corresponding category ispresent, a category may be newly added (Step 1208).

The aforementioned processing is carried out on all the defect images tocomplete the classification operation (Step 1210). FIG. 10 shows adisplay screen showing the corrected result. When the classificationoperation is completed, the category information concerning the defectimages is updated (Step 1213), and the updated result is transmitted tothe storage unit 202. In the case where the automatic classification isnot completed for all the defect images, that is, in the case wheredefect images that cannot be automatically classified are present (Step1205), the procedure is shifted to the classification operation by wayof manual classification, as shown in Steps 206 to 212.

Since, in this embodiment, the corresponding category information isalso obtained from the position on the display screen on which defectimages are arranged in accordance with the area attribute informationstored in advance, the correction of a classification category for thedefect image can be carried out easily. In other words, since thecorresponding category information is obtained from the position on thedisplay screen on which defect images are arranged, even if a correctionor the like should occur, the user need merely move the defect image onthe display screen, and the classification operation including thecorrection can be realized very easily, enhancing the convenience inuse.

Finally, an example of analysis using the above-described classifiedresults will be explained below.

In analyzing the classified results, an applicable classified result isobtained from the storage unit 202 in the display/analyzing device 203.FIG. 16 shows one example of the analyzing screens thereof. Numeral 1601designates a position of the detected defect image obtained from theclassified results shown in FIG. 11, showing a defect distribution onthe wafer. Numerals 1602 and 1603 designate the defect images on thewafer, the imaging conditions and the like. Numeral 1604 designates aclassification result display area, in which the classified resultsrelative to the applicable defect images are collected on the spot todisplay the results thereof. For example, the number of occurrences andthe rate of occurrence according to the categories are calculated fromthe classified results shown in FIG. 11 and are displayed.

Although not shown, as a further possibility, a specific category isselected whereby defects on a wafer with the category are shown in arecognizable way according to the colors thereof on the position 1601.Here, defects of applicable categories are extracted using theclassified results shown in FIG. 11, and the positions of the defects onthe wafer are extracted to enable the display of the positions in coloras desired.

Although not shown, alternatively, the classified results may bedisplayed by a circular graph, a broken-line graph or a bar graphaccording to the categories. These displays may be output to separatewindows or may be displayed simultaneously on a single window. Further,these displays may be printed out for the purpose of making reports, ordata may be output to files or the like.

The cause of occurrence of the defects is investigated using aclassified result such as described to measure the production line earlyin the manufacture of a device, thus enabling prevention of a loweringof the yield of the production line. Accordingly, it is possible toshorten the feedback time of the analyzed results to the productionline, including the time needed for the classification operation, toprevent a lowering of the yield of the production line.

According to the present invention, the efficiency of the classificationoperation is realized by improving a user's interface, thus enabling ashortening of the analysis time and an enhancement of the analysisaccuracy.

1. An inspecting system comprising: an analyzing unit including an imagedetection device to produce a plurality of images of a workpiece; astorage unit to store said plurality of images produced by said imagedetection device and classification information; a display screen unitto arrange a first display screen area for displaying said plurality ofimages stored in said storage unit that have not been classified and aplurality of second display screen areas for classifying and displayingsaid images on the same display screen; and a moving unit to allowuser-manual-movement of each image of said plurality of images from thefirst display screen area to selected ones of the second display screenareas for defect-classification according to visual features of saidimages; wherein unclassified images in the first display screen area andclassified images within ones of the second display screen areas aresimultaneously displayed on the same display screen, and theunclassified images can be classified by visually comparing unclassifiedimages in the first display screen area and classified images withinones of the second display screen areas.
 2. An analyzing unitcomprising: a storage unit to store a plurality of images andclassification information; a display screen unit to arrange a firstdisplay screen area for displaying said plurality of images stored insaid storage unit that have not been classified and a plurality ofsecond display screen areas for classifying and displaying said imageson the same display screen; and a moving unit to allowuser-manual-movement of ones of said plurality of images from the firstdisplay screen area to selected ones of the second display screen areasfor defect-classification according to visual features of said images;wherein unclassified images in the first display screen area andclassified images within ones of the second display screen areas aresimultaneously displayed on the same display screen, and theunclassified images can be visually classified by comparing unclassifiedimages in the first display screen area and classified images withinones of the second display screen areas.
 3. A method of manufacturing anelectronic device, wherein use is made of a manufacturing apparatus forprocessing a workpiece to form an electronic device, an inspectingapparatus for inspecting the workpiece processed by said manufacturingapparatus, an analyzing unit including an image detection device whichis capable of producing a plurality of images of said workpiece, and astorage unit to store said images of said workpiece detected by saidimage detection device and classification information, the methodcomprising: displaying said plurality of images stored in said storageunit that have not been classified on a first display screen area of adisplay screen, and displaying a plurality of second display screenareas for classifying and displaying said images according to visualfeatures of said images on the same display screen; manually moving onesof said images on said display screen from said first display screenarea to selected second display screen areas to classify and displaysaid detected images in said second display screen areas; providinginformation to said analyzing unit concerning images in said seconddisplay screen areas of said screen; and controlling the production linehaving said manufacturing apparatus arranged thereon using informationobtained from said analyzing unit; wherein unclassified images in thefirst display screen area and classified images within ones of thesecond display screen areas are simultaneously displayed on the samedisplay screen, and the unclassified images can be visually classifiedby comparing unclassified images in the first display screen area andclassified images within ones of the second display screen areas.
 4. Aninspecting system comprising: an analyzing unit, said analyzing unitincluding an image detection device to produce images of semiconductormanufacturing defects for a workpiece; a display screen havingsimultaneously arranged on a same screen both a sorting display screenarea in which to display ones of said images with unclassifiedsemiconductor manufacturing defects, and a plurality ofdefect-classification display screen areas into which each image of saidimages may be classified and displayed according to visual manufacturingdefect features contained in the image; and a user-manipulated movingunit to move a subject image from said sorting display screen area toselected ones of said defect-classification display screen areas, toclassify and display said subject image in the selected ones of saiddefect-classification display screen areas; wherein unclassified imagesin the sorting display screen area and classified images within ones ofthe defect-classification display screen areas are simultaneouslydisplayed on the same display screen, and the unclassified images can bevisually classified by comparing unclassified images in the sortingdisplay screen area and classified images within ones of thedefect-classification display screen areas.
 5. An inspecting system asclaimed in claim 4, wherein the user-manipulated moving unit includes auser-manipulated pointing device to point to, select and drag-and-dropsaid image from said sorting display screen area into selected ones ofsaid defect-classification display screen areas.
 6. An inspecting systemas claimed in claim 5, wherein said user-manipulated pointing device isa mouse.
 7. An inspecting system as claimed in claim 4, comprising amemory to store predetermined information for at least ones of saidimages including defect-classification information, and an adjuster unitto automatically adjust said defect-classification information for saidimages to match a defect classification of the selected one of saiddefect-classification display screen areas to which said images aremoved.
 8. An inspecting method, comprising: using an image detectiondevice to produce images of semiconductor manufacturing defects in aworkpiece; displaying images of unclassified semiconductor manufacturingdefects within a sorting display screen area of a display screen, anddisplaying a plurality of defect-classification display screen areas onthe same display screen into which each image of said images may beclassified and displayed according to visual manufacturing defectfeatures contained in the images; and user-manipulated moving of asubject image from said sorting display screen area to selected ones ofsaid defect-classification display screen areas, to classify and displayeach said image in the selected one of said defect-classificationdisplay screen areas; wherein unclassified images in the sorting displayscreen area and classified images within ones of thedefect-classification display screen areas are simultaneously displayedon the same display screen, and the unclassified images can be visuallyclassified by comparing unclassified images in the sorting displayscreen area and classified images within ones of thedefect-classification display screen areas.
 9. An inspecting method asclaimed in claim 8, wherein said user-manipulated moving is effectedwith a user-manipulated pointing device to point to, select anddrag-and-drop said images from said sorting display screen area into theselected ones of said defect-classification display screen areas.
 10. Aninspecting method as claimed in claim 9, wherein said user-manipulatedpointing device is a mouse.
 11. An inspecting method as claimed in claim8, comprising: storing predetermined information for at least ones ofsaid images including defect-classification information in a memory; andautomatically adjusting said defect-classification information for saidsubject image to match a defect classification of the selected one ofsaid defect-classification display screen areas to which said images aremoved.
 12. An inspecting system as claimed in claim 1, wherein images ofmultiple classified ones of the images are simultaneously displayablewithin ones of the second display screen areas.
 13. An inspecting systemas claimed in claim 1, comprising a data update unit to automaticallyupdate the classification information stored in the storage unit, foreach image manually-moved to one of the second display screen areas. 14.An inspecting system as claimed in claim 1, comprising a user-classifierunit to allow user-designation of classification criteria for theplurality of second display screen areas into which each image of saidimages may be classified and displayed.
 15. An analyzing unit as claimedin claim 2, wherein images of multiple classified ones of the images aresimultaneously displayable within ones of the second display screenareas.
 16. An analyzing unit as claimed in claim 2, comprising a dataupdate unit to automatically update the classification informationstored in the storage unit, for each image manually-moved to one of thesecond display screen areas.
 17. An analyzing unit as claimed in claim2, comprising a user-classifier unit to allow user-designation ofclassification criteria for the plurality of second display screen areasinto which each image of said images may be classified and displayed.18. A method as claimed in claim 3, wherein images of multipleclassified ones of the images are simultaneously displayable within onesof the second display screen areas.
 19. A method as claimed in claim 3,comprising automatically updating the classification information storedin the storage unit, for each image manually-moved to one of the seconddisplay screen areas.
 20. A method as claimed in claim 3, comprisingallowing user-designation of classification criteria for the pluralityof second display screen areas into which each image of said images maybe classified and displayed.
 21. An inspecting system as claimed inclaim 4, wherein images of multiple classified ones of the images aresimultaneously displayable within ones of the defect-classificationdisplay screen areas.
 22. An inspecting system as claimed in claim 4,comprising a user-classifier unit to allow user-designation ofclassification criteria for the plurality of defect-classificationdisplay screen areas into which each image of said images may beclassified and displayed.
 23. An inspecting system as claimed in claim4, wherein the user-manipulated moving unit is also to move a previouslyclassified image from one of said defect-classification display screenareas to a differing one of said defect-classification display screenareas, to reclassify and display said classified image in the differingone of said defect-classification display screen areas.
 24. Aninspecting method as claimed in claim 8, wherein images of multipleclassified ones of the images are simultaneously displayable within onesof the defect-classification display screen areas.
 25. An inspectingmethod as claimed in claim 8, comprising allowing user-designation ofclassification criteria for the plurality of defect-classificationdisplay screen areas into which each image of said images may beclassified and displayed.
 26. An inspecting method as claimed in claim8, comprising moving a previously classified image from one of saiddefect-classification display screen areas to a differing one of saiddefect-classification display screen areas, to reclassify and displaysaid classified image in the differing one of said defect-classificationdisplay screen areas.
 27. An inspecting system comprising: an analyzingunit including an image detection device to produce a plurality ofimages of a workpiece; a display screen unit to arrange a sortingdisplay screen area on a display screen, in which plural ones of saidimages with unclassified semiconductor manufacturing defects aredisplayable, and to simultaneously arrange a plurality ofdefect-classification display screen areas into which each image of saidimages may be classified according to visual manufacturing defectfeatures contained in the image on the same display screen; and auser-manipulated moving unit to allow user-manual-movement of a subjectimage from said sorting display screen area to selected ones of saiddefect-classification display screen areas, to classify and display saidsubject image in the selected ones of said defect-classification displayscreen areas; wherein images of multiple classified ones of said imagesare simultaneously displayable within ones of the defect-classificationdisplay screen areas; and wherein unclassified images in the sortingdisplay screen area and classified images within ones of thedefect-classification display screen areas are simultaneously displayedon the same display screen, and the unclassified images can be visuallyclassified by comparing unclassified images in the sorting displayscreen area and classified images within ones of thedefect-classification display screen areas.
 28. An inspecting system asclaimed in claim 27, wherein said user-manipulated moving unit includesa mouse.
 29. An inspecting system as claimed in claim 27, comprising amemory to store predetermined information for at least ones of saidimages including defect-classification information, and an adjuster unitto automatically adjust said defect-classification information for saidimages to match a defect classification of the selected one of saiddefect-classification display screen areas to which said images aremoved.
 30. An inspecting system as claimed in claim 27, wherein theuser-manipulated moving unit is also to move a previously classifiedimage from one of said defect-classification display screen areas to adiffering one of said defect-classification display screen areas, toreclassify and display said classified image in the differing one ofsaid defect-classification display screen areas.
 31. An inspectingmethod comprising: using an image detection device to produce images ofsemiconductor manufacturing defects for a workpiece; displaying on adisplay screen a sorting display screen area in which plural ones ofsaid images with unclassified semiconductor manufacturing defects aredisplayable, and simultaneously displaying on the same display screen aplurality of defect-classification display screen areas into which eachimage of said images may be classified according to visual manufacturingdefect features contained in the image; and user-manipulated moving asubject image from said sorting display screen area to selected ones ofsaid defect-classification display screen areas, to classify and displaysaid subject image in the selected ones of said defect-classificationdisplay screen areas; wherein images of multiple classified ones of saidimages are simultaneously displayable within ones of thedefect-classification display screen areas; and wherein unclassifiedimages in the sorting display screen area and classified images withinones of the defect-classification display screen areas aresimultaneously displayed on the same display screen, and theunclassified images can be visually classified by comparing unclassifiedimages in the sorting display screen area and classified images withinones of the defect-classification display screen areas.
 32. Aninspecting method as claimed in claim 31, wherein said user-manipulatedmoving is effected with a mouse.
 33. An inspecting method as claimed inclaim 31, comprising storing predetermined information for at least onesof said images including defect-classification information, andautomatically adjusting said defect-classification information for saidimages to match a defect classification of the selected one of saiddefect-classification display screen areas to which said images aremoved.
 34. An inspecting method as claimed in claim 31, comprisingmoving a previously classified image from one of saiddefect-classification display screen areas to a differing one of saiddefect-classification display screen areas, to reclassify and displaysaid classified image in the differing one of said defect-classificationdisplay screen areas.